Granted Patent
Utility
US 6,423,284 · App. 09/420,080
Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
Inventors:
Jose Arno, Robert M. Vermeulen
Patented Case
View Patent ↗
Granted: Jul 23, 2002
Filed: Oct 18, 1999
Inventors
Jose Arno
Robert M. Vermeulen
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.