Granted Patent
Utility
US 6,423,978 · App. 09/492,186
System for detecting disk-shaped object such as semiconductor wafer or magnetic disk
Inventors:
Naofumi Furuta, Sadao Noda
Patented Case
View Patent ↗
Granted: Jul 23, 2002
Filed: Jan 27, 2000
Inventors
Naofumi Furuta
Sadao Noda
Assignee (at issue)
SUNX Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.