IP Library Granted Patent US 6,424,466
Granted Patent Utility
US 6,424,466 · App. 09/847,685

Dual cavity MEMS tunable Fabry-Perot filter

Inventor: Dale C. Flanders
Patented Case View Patent ↗
Granted: Jul 23, 2002 Filed: May 2, 2001
Inventor
Dale C. Flanders
Assignee (at issue)
Axsun Technologies, Inc.

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Quick Facts
Patent No.
US 6,424,466
App. No.
09/847,685
Filed
2001-05-02
Granted
2002-07-23
Kind
B1