Granted Patent
Utility
US 6,424,733 · App. 09/118,835
Method and apparatus for inspecting wafers
Inventor:
Rodney C. Langley
Patented Case
View Patent ↗
Granted: Jul 23, 2002
Filed: Jul 20, 1998
Inventor
Rodney C. Langley
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.