Granted Patent
Utility
US 6,426,016 · App. 09/369,265
Method for etching passivation layers and antireflective layer on a substrate
Inventors:
Cheng-Jui Yang, Chang Wang, Hwang-Ming Chen, Hu-Ching Lin
Patented Case
View Patent ↗
Granted: Jul 30, 2002
Filed: Aug 6, 1999
Inventors
Cheng-Jui Yang
Chang Wang
Hwang-Ming Chen
Hu-Ching Lin
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.