IP Library › Granted Patent US 6,426,254
Granted Patent Utility
US 6,426,254 · App. 09/328,763

Method for expanding trenches by an anisotropic wet etch

Inventors: Stephen Kudelka, Alexander Michaelis, Dirk Tobben
Patented Case View Patent ↗
Granted: Jul 30, 2002 Filed: Jun 9, 1999
Inventors
Stephen Kudelka
Alexander Michaelis
Dirk Tobben
Assignee (at issue)
Infineon Technologies AG

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Quick Facts
Patent No.
US 6,426,254
App. No.
09/328,763
Filed
1999-06-09
Granted
2002-07-30
Kind
B2