Granted Patent
Utility
US 6,426,277 · App. 09/421,454
Methods and a device for heat treating a semiconductor wafer having different kinds of impurities
Inventors:
Dong-Joo Bae, Kang-Wan Lee
Patented Case
View Patent ↗
Granted: Jul 30, 2002
Filed: Oct 19, 1999
Inventors
Dong-Joo Bae
Kang-Wan Lee
Assignees (at issue)
Anam Semiconductor
Amkor Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.