Granted Patent
Utility
US 6,426,562 · App. 09/921,205
Mask repattern process
Inventor:
Warren M. Farnworth
Patented Case
View Patent ↗
Granted: Jul 30, 2002
Filed: Aug 2, 2001
Inventor
Warren M. Farnworth
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.