Granted Patent
Utility
US 6,427,359 · App. 09/907,487
Systems and methods for processing workpieces
Inventors:
Dana Scranton, Eric J. Bergman, Eric Lund, Gil Lund
Patented Case
View Patent ↗
Granted: Aug 6, 2002
Filed: Jul 16, 2001
Inventors
Dana Scranton
Eric J. Bergman
Eric Lund
Gil Lund
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.