Granted Patent
Utility
US 6,428,262 · App. 09/637,096
Compact load lock system for ion beam processing of foups
Inventors:
John W. Vanderpot, John D. Pollock
Patented Case
View Patent ↗
Granted: Aug 6, 2002
Filed: Aug 10, 2000
Inventors
John W. Vanderpot
John D. Pollock
Assignee (at issue)
Proteros, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.