Granted Patent
Utility
US 6,428,397 · App. 09/720,111
Wafer edge polishing method and apparatus
Inventor:
Mark Andrew Stocker
Patented Case
View Patent ↗
Granted: Aug 6, 2002
Filed: Feb 21, 2000
Inventor
Mark Andrew Stocker
Assignee (at issue)
Unova UK Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.