Granted Patent
Utility
US 6,428,936 · App. 09/465,520
Method and apparatus that compensates for phase shift mask manufacturing defects
Inventor:
Richard E. Schenker
Patented Case
View Patent ↗
Granted: Aug 6, 2002
Filed: Dec 16, 1999
Inventor
Richard E. Schenker
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.