Granted Patent
Utility
US 6,429,058 · App. 09/585,767
Method of forming fully self-aligned TFT improved process window
Inventors:
Evan G. Colgan, Hisanori Kinoshita, Hiroaki Kitahara, Kai Schleupen
Patented Case
View Patent ↗
Granted: Aug 6, 2002
Filed: Jun 2, 2000
Inventors
Evan G. Colgan
Hisanori Kinoshita
Hiroaki Kitahara
Kai Schleupen
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.