Granted Patent
Utility
US 6,429,131 · App. 09/271,684
CMP uniformity
Inventors:
Chenting Lin, Robert van den Berg, Sumit Pandey
Patented Case
View Patent ↗
Granted: Aug 6, 2002
Filed: Mar 18, 1999
Inventors
Chenting Lin
Robert van den Berg
Sumit Pandey
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.