Granted Patent
Utility
US 6,429,928 · App. 09/399,242
Method and apparatus employing external light source for endpoint detection
Inventors:
David Johnson, Joe Lee Phillips, Todd Nielsen, Robert James Hatfield
Patented Case
View Patent ↗
Granted: Aug 6, 2002
Filed: Sep 20, 1999
Inventors
David Johnson
Joe Lee Phillips
Todd Nielsen
Robert James Hatfield
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.