Granted Patent
Utility
US 6,432,285 · App. 09/687,317
Planar magnetron sputtering apparatus
Inventors:
William P. Kastanis, M. Elizabeth Wescott
Patented Case
View Patent ↗
Granted: Aug 13, 2002
Filed: Oct 13, 2000
Inventors
William P. Kastanis
M. Elizabeth Wescott
Assignee (at issue)
Cierra Photonics Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.