Granted Patent
Utility
US 6,432,492 · App. 09/091,004
HF-Plasma coating chamber or PECVD coating chamber, its use and method of plating CDs using the chamber
Inventor:
Juergen Weichart
Patented Case
View Patent ↗
Granted: Aug 13, 2002
Filed: Nov 13, 1998
Inventor
Juergen Weichart
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.