Granted Patent
Utility
US 6,432,836 · App. 09/393,686
Cleaning method for semiconductor substrate and cleaning solution
Inventor:
Kaori Watanabe
Patented Case
View Patent ↗
Granted: Aug 13, 2002
Filed: Sep 10, 1999
Inventor
Kaori Watanabe
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.