Granted Patent
Utility
US 6,433,878 · App. 09/772,148
Method and apparatus for the determination of mask rules using scatterometry
Inventors:
Xinhui Niu, Nickhil Jakatdar
Patented Case
View Patent ↗
Granted: Aug 13, 2002
Filed: Jan 29, 2001
Inventors
Xinhui Niu
Nickhil Jakatdar
Assignee (at issue)
Timbre Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.