Granted Patent
Utility
US 6,433,993 · App. 09/283,100
Formation of thin film capacitors
Inventors:
Andrew Tye Hunt, Wen-Yi Lin, Tzyy Jiuan Hwang, Michelle Hendrick, Helmut G. Hornis
Patented Case
View Patent ↗
Granted: Aug 13, 2002
Filed: Mar 31, 1999
Inventors
Andrew Tye Hunt
Wen-Yi Lin
Tzyy Jiuan Hwang
Michelle Hendrick
Helmut G. Hornis
Assignee (at issue)
MicroCoating Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.