Granted Patent
Utility
US 6,435,196 · App. 09/451,706
Impurity processing apparatus and method for cleaning impurity processing apparatus
Inventors:
Noritada Satoh, Kouichi Ohira, Bunya Matsui, Kazuo Maeda
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Dec 1, 1999
Inventors
Noritada Satoh
Kouichi Ohira
Bunya Matsui
Kazuo Maeda
Assignees (at issue)
Canon Sales Co., Inc.
Semiconductor Process Laboratory Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.