Granted Patent
Utility
US 6,435,947 · App. 09/766,750
CMP polishing pad including a solid catalyst
Inventors:
Brian L. Mueller, Shumin Wang
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Jan 22, 2001
Inventors
Brian L. Mueller
Shumin Wang
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.