Granted Patent
Utility
US 6,436,246 · App. 08/788,980
Collimated sputter deposition monitor using sheet resistance
Inventor:
Gurtej S. Sandhu
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Jan 27, 1997
Inventor
Gurtej S. Sandhu
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.