Granted Patent
Utility
US 6,436,281 · App. 09/829,871
Apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabrication
Inventors:
Jürgen Hammer, Andre Richter, Werner Kraus, Heinz-Dieter Petermann
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Apr 10, 2001
Inventors
Jürgen Hammer
Andre Richter
Werner Kraus
Heinz-Dieter Petermann
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.