Granted Patent
Utility
US 6,436,731 · App. 09/737,056
Method of producing a semiconductor device comprising a cleaning process for removing silicon-containing material
Inventors:
Achim Neu, Volker Strutz, Rudiger Uhlmann, Stephan Wege
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Dec 14, 2000
Inventors
Achim Neu
Volker Strutz
Rudiger Uhlmann
Stephan Wege
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.