Granted Patent
Utility
US 6,436,778 · App. 09/879,738
Re-oxidation approach to improve peripheral gate oxide integrity in a tunnel nitride oxidation process
Inventors:
Hao Fang, Yue-Song He
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Jun 12, 2001
Inventors
Hao Fang
Yue-Song He
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.