Granted Patent
Utility
US 6,436,796 · App. 09/495,402
Systems and methods for epitaxial processing of a semiconductor substrate
Inventors:
Robert D. Mailho, Mark J. O'Hara, Glenn A. Pfefferkorn, Gary Evans, Kristian E. Johnsgard
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Jan 31, 2000
Inventors
Robert D. Mailho
Mark J. O'Hara
Glenn A. Pfefferkorn
Gary Evans
Kristian E. Johnsgard
Assignee (at issue)
Mattson Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.