Granted Patent
Utility
US 6,436,835 · App. 09/622,939
Composition for polishing a semiconductor device and process for manufacturing a semiconductor device using the same
Inventors:
Takanori Kido, Kagetaka Ichikawa
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Aug 24, 2000
Inventors
Takanori Kido
Kagetaka Ichikawa
Assignee (at issue)
Showa Denko K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.