Granted Patent
Utility
US 6,436,846 · App. 09/146,870
Combined preanneal/oxidation step using rapid thermal processing
Inventors:
Helmut Tews, Martin Schrems, Thomas Gaertner
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Sep 3, 1998
Inventors
Helmut Tews
Martin Schrems
Thomas Gaertner
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.