Granted Patent
Utility
US 6,437,283 · App. 09/725,348
Device and method for processing substrates
Inventors:
Udo Wiggermann, Alex Schreiner, Hans Mayer, Leo M. Higgins, III, Eddy Roelants
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Nov 29, 2000
Inventors
Udo Wiggermann
Alex Schreiner
Hans Mayer
Leo M. Higgins, III
Eddy Roelants
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.