Granted Patent
Utility
US 6,437,330 · App. 09/360,338
Method and apparatus for adjusting a charged particle beam of a beam optical system
Inventor:
Yasuhiko Sugiyama
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Jul 26, 1999
Inventor
Yasuhiko Sugiyama
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.