Granted Patent
Utility
US 6,437,381 · App. 09/560,081
Semiconductor memory device with reduced orientation-dependent oxidation in trench structures
Inventors:
Ulrike Gruening, Rajarao Jammy, Helmut Tews
Patented Case
View Patent ↗
Granted: Aug 20, 2002
Filed: Apr 27, 2000
Inventors
Ulrike Gruening
Rajarao Jammy
Helmut Tews
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.