IP Library Granted Patent US 6,438,460
Granted Patent Utility
US 6,438,460 · App. 09/920,353

Method of using a specimen sensing end effector to determine the thickness of a specimen

Inventors: Paul Bacchi, Paul S. Filipski
Patented Case View Patent ↗
Granted: Aug 20, 2002 Filed: Aug 1, 2001
Inventors
Paul Bacchi
Paul S. Filipski
Assignee (at issue)
NEWPORT CORPORATION

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Quick Facts
Patent No.
US 6,438,460
App. No.
09/920,353
Filed
2001-08-01
Granted
2002-08-20
Kind
B1