IP Library Granted Patent US 6,440,751
Granted Patent Utility
US 6,440,751 · App. 09/653,141

Method of manufacturing thin film and thin film capacitor

Inventor: Takashi Hase
Patented Case View Patent ↗
Granted: Aug 27, 2002 Filed: Aug 31, 2000
Inventor
Takashi Hase
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 6,440,751
App. No.
09/653,141
Filed
2000-08-31
Granted
2002-08-27
Kind
B1