Granted Patent
Utility
US 6,440,816 · App. 09/771,621
Alignment mark fabrication process to limit accumulation of errors in level to level overlay
Inventors:
Reginald Conway Farrow, Isik C. Kizilyalli
Patented Case
View Patent ↗
Granted: Aug 27, 2002
Filed: Jan 30, 2001
Inventors
Reginald Conway Farrow
Isik C. Kizilyalli
Assignee (at issue)
Agere Systems Guardian Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.