Granted Patent
Utility
US 6,440,823 · App. 09/179,049
Low defect density (Ga, Al, In)N and HVPE process for making same
Inventors:
Robert P. Vaudo, Vivek Phanse, Michael A. Tischler
Patented Case
View Patent ↗
Granted: Aug 27, 2002
Filed: Oct 26, 1998
Inventors
Robert P. Vaudo
Vivek Phanse
Michael A. Tischler
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.