Granted Patent
Utility
US 6,440,879 · App. 09/755,545
Physical vapor deposition apparatus with modified shutter disk and cover ring
Inventors:
Robert B. Hixson, Jason Lee Monfort, Gary Groshong, Jose Gonzalez
Patented Case
View Patent ↗
Granted: Aug 27, 2002
Filed: Jan 5, 2001
Inventors
Robert B. Hixson
Jason Lee Monfort
Gary Groshong
Jose Gonzalez
Assignee (at issue)
Integrated Device Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.