Granted Patent
Utility
US 6,441,447 · App. 09/367,325
Co-patterning thin-film resistors of different compositions with a conductive hard mask and method for same
Inventors:
Joseph A. Czagas, George Bajor, Leonel Ernesto Enriquez, Chris A. McCarty
Patented Case
View Patent ↗
Granted: Aug 27, 2002
Filed: Aug 11, 1999
Inventors
Joseph A. Czagas
George Bajor
Leonel Ernesto Enriquez
Chris A. McCarty
Assignee (at issue)
Intersil Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.