Granted Patent
Utility
US 6,441,491 · App. 09/769,089
Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same
Inventors:
Alfred Grill, David R. Medeiros, Vishnubhai V. Patel
Patented Case
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Granted: Aug 27, 2002
Filed: Jan 25, 2001
Inventors
Alfred Grill
David R. Medeiros
Vishnubhai V. Patel
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.