IP Library › Granted Patent US 6,441,620
Granted Patent Utility
US 6,441,620 · App. 09/650,277

Method for fault identification in a plasma process

Inventors: John Scanlan, Justin Lawler, Stephen Daniels
Patented Case View Patent ↗
Granted: Aug 27, 2002 Filed: Aug 29, 2000
Inventors
John Scanlan
Justin Lawler
Stephen Daniels

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Quick Facts
Patent No.
US 6,441,620
App. No.
09/650,277
Filed
2000-08-29
Granted
2002-08-27
Kind
B1