Granted Patent
Utility
US 6,444,027 · App. 09/566,890
Modified susceptor for use in chemical vapor deposition process
Inventors:
Charles C. Yang, Robert W. Standley
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: May 8, 2000
Inventors
Charles C. Yang
Robert W. Standley
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.