Granted Patent
Utility
US 6,444,136 · App. 09/559,292
Fabrication of improved low-k dielectric structures
Inventors:
Q. Z. Liu, Bin Zhao
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: Apr 25, 2000
Inventors
Q. Z. Liu
Bin Zhao
Assignee (at issue)
Newport Fab, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.