Granted Patent
Utility
US 6,444,138 · App. 09/334,408
Method of fabricating microelectromechanical and microfluidic devices
Inventors:
James E. Moon, Timothy Joel Davis, Gregory J. Galvin, Kevin A. Shaw, Paul C. Waldrop, Sharlene A. Wilson
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: Jun 16, 1999
Inventors
James E. Moon
Timothy Joel Davis
Gregory J. Galvin
Kevin A. Shaw
Paul C. Waldrop
Sharlene A. Wilson
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.