IP Library › Granted Patent US 6,444,530
Granted Patent Utility
US 6,444,530 · App. 09/318,429

Process for fabricating an integrated circuit with a self-aligned contact

Inventors: Hung-Sheng Chen, Unsoon Kim, Yu Sun, Chi Chang, Mark T. Ramsbey, Mark Randolph, Tatsuya Kajita, Angela T. Hui, Fei Wang, Mark S. Chang
Patented Case View Patent ↗
Granted: Sep 3, 2002 Filed: May 25, 1999
Inventors
Hung-Sheng Chen
Unsoon Kim
Yu Sun
Chi Chang
Mark T. Ramsbey
Mark Randolph
Tatsuya Kajita
Angela T. Hui
Fei Wang
Mark S. Chang
Assignee (at issue)
Advanced Micro Devices, Inc.

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Quick Facts
Patent No.
US 6,444,530
App. No.
09/318,429
Filed
1999-05-25
Granted
2002-09-03
Kind
B1