Granted Patent
Utility
US 6,444,549 · App. 09/144,938
Thermal processing of semiconductor devices
Inventors:
Toshiya Hayashi, Kouji Hamada, Naoharu Nishio, Kousuke Miyoshi, Shuichi Saito
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: Sep 1, 1998
Inventors
Toshiya Hayashi
Kouji Hamada
Naoharu Nishio
Kousuke Miyoshi
Shuichi Saito
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.