Granted Patent
Utility
US 6,444,591 · App. 09/677,708
Method for reducing contamination prior to epitaxial growth and related structure
Inventors:
Klaus Schuegraf, David L. Chapek
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: Sep 30, 2000
Inventors
Klaus Schuegraf
David L. Chapek
Assignee (at issue)
Newport Fab, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.