IP Library Granted Patent US 6,444,945
Granted Patent Utility
US 6,444,945 · App. 09/818,680

Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source

Inventors: Peter Maschwitz, Jaime Antonio Li
Patented Case View Patent ↗
Granted: Sep 3, 2002 Filed: Mar 28, 2001
Inventors
Peter Maschwitz
Jaime Antonio Li
Assignee (at issue)
CPFilms Inc.

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Quick Facts
Patent No.
US 6,444,945
App. No.
09/818,680
Filed
2001-03-28
Granted
2002-09-03
Kind
B1