Granted Patent
Utility
US 6,444,974 · App. 09/352,782
Method for transferring a dummy wafer
Inventor:
Hiroshi Kojima
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: Jul 14, 1999
Inventor
Hiroshi Kojima
Assignees (at issue)
ASAHI GLASS CO., LTD.
TOKAI CARBON CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.