Granted Patent
Utility
US 6,445,516 · App. 09/874,929
Lens system, in particular projection lens system in semiconductor lithography
Inventor:
Karlfrid Osterried
Patented Case
View Patent ↗
Granted: Sep 3, 2002
Filed: Jun 5, 2001
Inventor
Karlfrid Osterried
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.