Granted Patent
Utility
US 6,446,644 · App. 09/609,879
Chemical solutions system for processing semiconductor materials
Inventor:
Kert Dolechek
Patented Case
View Patent ↗
Granted: Sep 10, 2002
Filed: Jul 5, 2000
Inventor
Kert Dolechek
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.